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Product Detail

Filming room

Filming room
产品详情

Graphite boat loading room

product manual

The equipment is used in the solar industry and the PECVD carrier, and the silicon wafer is installed to prepare a high-efficiency filter. After the air passes through the high-efficiency filter, the damping layer is evenly pressed, so that the clean air flow is vertically and unidirectionally fed into the loading work area. This ensures that the work area meets the cleanliness required by the process.

Characteristics
1 Ensures accurate positioning with PECVD graphite boat carriers;
2 Made of SUS304 stainless steel, the structure of the whole machine is firm and reliable;
3 using GK series high efficiency air filter;
4 Purifying fan noise is less than 50dB;
5 Ensure the cleanliness of the process achieved in the work area.
6 PECVD carrier can be tilted 15 degrees or rotated 180 degrees inside;

Device name

PECVD loading room

Total power

220V   800W

Time display

Digital display

control method

Photoelectric induction automatic blowing, microcomputer control

Centrifugal air volume

1000m3/h

Voltage and power

AC220V/800W

Dimensions

1580×900×2400(mm)


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Suzhou headquarters:No. 99 Tongcheng Road, Weitang Town, Xiangcheng District, Suzhou

Telephone:0512-69598709 

Fax:0512-69598912

Contacts:Hu Ji Yong

Mobile phone:13732648199

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